Measurement Equipment —— Total Pitch/ Center Shift Measurement


SOM255/10

SOM245/10

SOM245 cooperates with lithography equipments, designed for measuring total pitch/ center shift, and compatible with CD/ Overlay and film thickness measurement.
   Product Features

● High Efficiency

● High Precision

● Multi-functional

● Efficient Temperature Control System

● Rapid and Flexible Customized Services

   Specifications

 Model

SOM245/10 

 SOM255/10

 CD Repeatability

 30nm@3Sigma

 30nm@3Sigma

CD Reproducibility

50nm@3Sigma 

 50nm@3Sigma

 TP Repeatability

 280nm@3Sigma

300nm@3Sigma

 TP Reproducibility

400nm@3Sigma 

450nm@3Sigma