200 Series Stepper —— TFT Exposure


SSB225

SSB245

SSB260

200 series scanner is specially designed for manufacturing process such as AM-OLED and TFT-LCD, supporting for volume production of 2.5G to 6GTFT display panels. Featured with high resolution and overlay accuracy, this series supports 6-inch reticles and greatly reduces costs for customers.
   Product Features

● Resolution up to 1.5μm

● Manufacturing 12-inch panel by 6-inch mask

● Intelligent calibration and diagnosis, convenient for machine calibration and periodic maintenance

   Specifications

 Model

Resolution

Overlay

 Substrate Size

SSB225/10

2μm L/S

0.6μm

370mm×470mm
500mm×500mm

SSB225/20

1.5μm L/S

0.5μm

370mm×470mm
500mm×500mm

 SSB245/10 2μm L/S 0.6μm 730mm×920mm
 SSB245/20 1.5μm L/S 0.5μm 730mm×920mm
 SSB260/10T 2μm L/S 0.6μm 1300mm×1500mm
1500mm×1850mm
 SSB260/20T 1.5μm L/S 0.5μm 1300mm×1500mm
1500mm×1850mm